Equipment Systems Upgrade

Description

• Engineering system design and supplies
• User friendly, programmable system
• Defects/Scraps prevention projects
• Includes electrical, mechanical and fluid systems
• Customized to fit requirements
• Wet Cart System and Heated Bench System for
MEMC/SunEdison
• Heater System for Etch DPS Metal System (Chiller to
Dry Heater System conversion)

Brief Illustration of the Failure Detection System

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Brief Illustration of the Heater Interlock System

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DPS Heater System

Fabricated_Installed Heater System on DPS Metal
Heater System

 

Fabricated/Installed Heater System on DPS Metal

Corroded coolant passage4 
Conversion to Heater Rods5 
Heater System Steup6 

 

Flowmeter System Upgrade w/Temperature and Interlock

Flowmeter Upgrade – From analog to digital with Temperature Monitoring and Interlock

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Heater System on DPS Metal

• Complete dry system – zero fluid/coolant leakage
• Eliminate potential shock hazards & electrical system failure due to fluid leakage
• Equipment downtime on chiller maintenance/swap
• Energy consumption savings of approx 56.3% comparing to existing NESLAB Steelhead 0 Chillers.
• 34.8kWh/79.5kWh = 43.7% of power consumed by existing chillers.
• Summary : 56.3% energy savings exclusive of chiller repair/maintenance

Heater System on DPS Metal & DPS Poly

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Load Lock Pressure Interlock

Screen Shot 2021-08-21 at 10-09-33 PM

PLC Monitoring System for Temperature/Power

• Continuous monitoring of input devices and decision making based upon custom program to control the state of output devices
• Complete system to monitor both heater temperature and heater element power consumption at susceptor
• Independent system, not interfering with existing OEM system configurations
• Configured alarm system that feedbacks to OEM tool
• Highly visible LED display of current temperature, OEM tool temperature and alarm status

Principles of the Failure Detection System

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Wet Cart System for Solar Industry

Cart System Fabrication – Stainless Steel and Plastic Welding

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S3

 

DPS ASP Temp

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Gallery

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